产品筛选

PVD薄膜沉积溅射靶材分类

材质金属,合金,陶瓷氧化物

纯度:99.9%~ 99.99999%

规格平面及管状
品牌: ZENKAAH
型号可订制

物理气相沉积(PVD)涵盖了薄膜技术领域的特殊工艺。它指代一切在真空基础下运用物理方式在基片表面沉积薄膜的镀膜工艺。

溅射工艺作为最为经济的沉积方法,在众多工艺中被视作标准镀膜技术,可以在种类繁多的基材上沉积多种材料。

溅射工艺广泛应用于多种领域,如,半导体工业表面处理、光学工业偏振滤镜的生产或建筑玻璃工业大面积表面镀膜等。

我们不仅向客户提供镀膜设备零配件,而且研发生产溅射靶材。我们的专业经验在超过10年的实践经验中不断得以完善。

所有PVD工艺中,用于生长薄膜的材料最初均为固体形式,且常被置于工艺腔室内的某处,比如,溅射靶材中。为使材料气化且随后能以薄膜的形式聚合沉积到基材表面,工艺过程中将应用到多种方式 (例如,使用短时、高能量的射频脉冲、加电弧、通过离子或电子轰击等)。

在热蒸发沉积工艺中,用于生长薄膜的材料将被电加热器加热,直至其转化为气态。PVD方法谱系也包括分子束外延和离子束溅射镀膜。上述方法产出的薄膜纯度超高、均匀性极好,而且对基材的附着力极强。PVD镀膜比传统电化学工艺更为环保,可利用其作为替代传统电化学工艺广泛应用于多种领域。产品如下:



SINGLE ELEMENTS 质靶材、电子束蒸发颗粒
Aluminum (Al)
Nickel (Ni)
Antimony (Sb)
Niobium (Nb)
Arsenic (As)
Osmium (Os)
Barium (Ba)
Palladium (Pd)
Beryllium (Be)
Platinum (Pt)
Boron (B)
Rhenium (Re)
Cadmium (Cd)
Rhodium (Rh)
Carbon (C)
Rubidium (Rb)
Chromium (Cr)
Ruthenium (Ru)
Cobalt (Co)
Selenium (Se)
Copper (Cu)
Silicon (Si)
Gallium (Ga)
Silver (Ag)
Germanium (Ge)
Tantalum (Ta)
Gold (Au)
Tellurium (Te)
Hafnium (Hf)
Tin (Sn)
Indium (In)
Titanium (Ti)
Iridium (Ir)
Tungsten (W)
Iron (Fe)
Vanadium (V)
Lead (Pb)
Yttrium (Y)
Magnesium (Mg)
Zinc (Zn)
Manganese (Mn)
Zirconium (Zr)
Molybdenum (Mo)

PRECIOUS METALS   稀贵金属材料、电子束蒸发颗粒
Gold (Au)
Palladium (Pd)
Silver (Ag)
Platinum (Pt)
Gold Arsenic (AuAs)
Rhenium (Re)
Gold Tin (AuSn)
Rhodium (Rh)
Iridium (Ir)
Ruthenium (Ru)
Osmium (Os)

ALLOYS & INTERMETALLICS    合金和金属化合物
Aluminum-Silver ( AlAg)
Cobalt-Iron (CoFe)
Aluminum-Cobalt ( AlCo)
Cobalt-Nickel (CoNi)
Aluminum-Chromium ( AlCr)
Gold-Germanium (AuGe)
Aluminum-Iron ( AlFe)
Gold-Tin (AuSn)
Aluminum-Indium ( Al/In)
Gold-Zinc (AuZn)
Aluminum- Magnesium (Al/Mg)
Hafnium-Lanthanum (Hf/La)
Aluminum-Copper (AlCu)
Manganese- Iridium (Mn/Ir)
Aluminum-Gold (AlAu)
Nickel-Chromium (NiCr)
Aluminum-Boron (AlB)
Nickel-Chromium-Iron (NiCrFe)
Aluminum-Silicon (AlSi)
Nickel-Iron (NiFe)
Aluminum-Silicon-Copper (AlSiCu)
Nickel-Titanium (NiTi)
Aluminum- Zirconium ( AlZr)
Nickel-Vanadium (NiV)
Chromium-Iron (CrFe)
Nickel-Zirconium (NiZr)
Chromium-Silicon (CrSi)
Tungsten-Titanium (WTi)
CARBIDES 碳化物
Aluminum Carbide (Al4C3)
Tantalum Carbide (TaC)
Boron Carbide (B4C)
Titanium Carbide (TiC)
Chromium Carbide (Cr3C2)
Tungsten-Cobalt Carbide (WC-Co)
Hafnium Carbide (HfC)
Tungsten Carbide (WC)
Molybdenum Carbide (Mo2C)
Vanadium Carbide (VC)
Niobium Carbide (NbC)
Zirconium Carbide (ZrC)
Silicon Carbide (SiC)

FLUORIDES   氟化物
Aluminum Fluoride (AlF3)
Lead Fluoride (PbF2)
Barium Fluoride (BaF2)
Lithium Fluoride (LiF)
Cadmium Fluoride (CdF2)
Magnesium Fluoride (MgF2)
Calcium Fluoride (CaF2)
Cryolite (Na3AlF6)
Cerium Fluoride (CeF2)
Yttrium Fluoride (YF3)
Hafnium Fluoride (HfF4)
Zirconium Fluoride (ZrF4)
SILICIDES 硅化物
Chromium Silicide (CrSi2)
Tantalum Silicide (TaSi2)
Hafnium Silicide (HfSi2)
Titanium Silicide (TiSi2)
Molybdenum Silicide (MoSi2)
Tungsten Silicide (WSi2)
Niobium Silicide (NbSi2)

BORIDES 硼化物
Aluminum Boride(AlB2)
Rare Earth Borides
Chromium Boride (CrB)
Tantalum Boride (TaB2)
Hafnium Boride (HfB2)
Titanium Boride (TiB2)
Lanthanum Boride (LaB6)
Tungsten Boride (W2B)
Molybdenum Boride (MoB)
Vanadium Boride (VB2)
Niobium Boride (NbB)
Zirconium Boride (ZrB2)
Nitrides 氮化物
Aluminum Nitride, AlN
Titanium Nitride, TiN
Boron Nitride, BN
Vanadium Nitride, VN
Niobium Nitride, NbN
Zirconium Nitride, ZrN
Silicon Nitride, Si(3)N(4)
Si(3)N(4)/TiN
Tantalum Nitride, TaN

SELENIDES, SULFIDES & TELLURIDES   硒化物、硫化物和碲化物
Antimony Sulfide (Sb2S3)
Lead Telluride (PbTe)
Antimony Selenide (Sb2Se3)
Molybdenum Selenide (MoSe2)
Antimony Telluride (Sb2Te3)
Molybdenum Sulfide (MoS2)
Arsenic Sulfide (As2S3)
Niobium Selenide (NbSe2)
Bismuth Selenide (Bi2Se3)
Niobium Sulfide (NbS)
Bismuth Telluride (Bi2Te)
Tantalum Selenide (Ta Se2)
Cadmium Selenide (CdSe)
Tantalum Sulfide (TaS2)
Cadmium Sulfide (CdS)
Tin Selenide (SnSe)
Cadmium Sulfoselenide (CdSSe)
Tin Telluride (SnTe)
Cadmium Telluride (CdTe)
Tungsten Selenide (Se2W)
Copper Selenide (Cu2Se)
Tungsten Sulfide (WS2)
Indium Telluride (In2Te3)
Zinc Selenide (ZnSe)
Lead Sulfide, PbS
Zinc Sulfide (ZnS)
Lead Selenide (PbSe)

OXIDES 氧化物
Aluminum Oxide (Al2O3)
Magnesium Oxide (MgO)
Antimony Oxide (Sb2O3)
Zirconium-Magnesium Oxide(ZrMgO3)
Barium Titanate (BaTiO3)
Magnesium-Zirconium Oxide (MgZrO3)
Bismuth Oxide (Bi2O3)
Molybdenum Oxide (MoO3)
Bismuth Titanate (Bi2Ti4O11)
Nickel-Chrome Oxide (CrNiO4)
Cerium Oxide (CeO2)
Nickel-Cobalt OxideNiCoO2
Cobalt-Chrome Oxide (CoCr2O4)
Niobium Pentoxide (Nb2O5)
Chromium Oxide (Cr2O3)
Rare Earth Garnets A3B2(SiO4)3
Chromium Oxide (Eu doped)
Rare Earth Oxides (La2O3)
Gallium Oxide (Ga2O3)
Silicon Dioxide (SiO2)
Germanium Oxide (GeO3)
Silicon Monoxide (SiO)
Hafnium Oxide (HfO2)
Tantalum Pentoxide (Ta2O5)
Indium Oxide (In2O3)
Tin Oxide (SnO2)
Indium-Tin Oxide (ITO)
Titanium Dioxide (TiO2)
Iron Oxide (Fe2O3)
Tungsten Oxide (WO3)
Lanthanum Oxide(La2O3)
Yttrium Oxide (Y2O3)
Lead Titanate(PbTiO3)
Yttrium-Aluminum Oxide (Y3Al5O12)
Lead Zirconate (ZrPbO3)
Zinc Oxide (ZnO)
Lithium Niobate (LiNbO3)
Zinc Oxide/Aluminum Oxide (Al2O3)
Lithium-Cobalt Oxide (CoLiO2)
Zirconium Oxide (ZrO2)
Lutetium-Iron Oxide (garnet) (Fe2LuO4)


领域产品
太阳能电池CuGa、CuGaNa、CuGaX、CuInGa、CIGS、ZnSx、SnSx、CuSx、CZTS、In-X、Ag及Ag合金、Al及Al合金、Cu及Cu合金、Ni及Ni合金、AZO、i-ZnO、ZnO-MgO、导电性Nb2O5、etc.
显示屏及
触摸屏
Ag及Ag合金、Al及Al合金、Cu及Cu合金、B-Si、Si-X、Ti、导电性Nb2O5、导电性TiO2、AZO、etc.
记录介质InAgSbTe、GeSbTe、GeSbTeSn、Ag及Ag合金、Al合金、Cu合金、ZnS-SiO2、高折射率材料、低折射率材料、etc.
半导体TiW、Au、Ni、Si、Ti、CrSix、MoSix、TaSix、TiSix、WSix、Ru、etc.
其他
功能膜
金属类Co、Pd、Pt、Ru、Sn、各种合金
陶瓷类Al2O3、SiO2、Ta2O5、ZnO系列保护膜、AZO-low n、塞龙(SiAlON)、各种复合氧化物、Ta-SiO2、各种金属-陶瓷混合物